Gas Distribution System
@temk-uHtODR
•
Oct 25, 2024
Oct 25, 2024
1.3K
There is gas supply system to excimer laser, and within this system there is a device, name and principle operation of which I would like to know.
It has three Inputs/Outputs named as IN, OUT and VAC
if gas enters IN port, it is transferred to VAC port, and in case if gas enters VAC port it is transferred to OUT.
This device is just a small box of approx. 3cm by 5cm; it is used for gas systems involving corrosive gases, so if corrosive gas enters VAC port - it goes to exhaust, and when it is required to change a cylinder with that gas, lines are emptied and filled with Helium through IN port.
So what is the name of this device? Thank you
It has three Inputs/Outputs named as IN, OUT and VAC
if gas enters IN port, it is transferred to VAC port, and in case if gas enters VAC port it is transferred to OUT.
This device is just a small box of approx. 3cm by 5cm; it is used for gas systems involving corrosive gases, so if corrosive gas enters VAC port - it goes to exhaust, and when it is required to change a cylinder with that gas, lines are emptied and filled with Helium through IN port.
So what is the name of this device? Thank you