Advantages of Proton Beam Writing in Lithography

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<a href="https://en.wikipedia.org/wiki/Proton_beam_writing" target="_blank" rel="noopener noreferrer">Proton Beam Writing</a>

The advantages listed can be summarised as follows -

1. Proton beams have deeper penetration than electrons in materials.
2. Since Proton beams travel in an almost straight path, they make fabrication of 3-D, high aspect ratio structures possible.
3. Proton beam writing exhibits minimal proximity effects.
4. Proton beams can displace atoms while traversing material, a feature which minimizes localized damage especially at the end of range.