Advantages of Proton Beam Writing in Lithography
What is the concept of proton beam writing in lithography for wafer fabrication and what is the main advantage to use it than e- beam lithography ??
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Ankita Katdare#-Link-Snipped-# Did you read about the topic on Wikipedia?
Proton Beam Writing
The advantages listed can be summarised as follows -
- Proton beams have deeper penetration than electrons in materials.
- Since Proton beams travel in an almost straight path, they make fabrication of 3-D, high aspect ratio structures possible.
- Proton beam writing exhibits minimal proximity effects.
- Proton beams can displace atoms while traversing material, a feature which minimizes localized damage especially at the end of range.
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